US3238918A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum deposition chamber for multiple operations
Assignee: Lear Siegler Inc
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Filing: 1961-12-26
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Granted: 1966-03-08
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Expires: 1981-12-26
Abstract
No abstract record available.
Inventors
- 👤 Richard P Radke
- 👤 William E Blair
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 21:54
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/22; C23C14/56
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
129 words
IN A VACUUM CHAMBER HAVING MEANS TO EVACUATE GASES THEREFROM, THE COMBINATION COMPRISING: (A) A VERTICALLY MOVABLE SUBSTRATE SUPPORTING MEANS, ROTATABLY MOUNTED IN SAID CHAMBER, FOR SUPPORTING A PLURALITY OF SUBSTRATES IN A HORIZONTALLY DISPOSED PLANE; (B) A PLURALITY OF MATERIAL EVAPORATION SOURCE HOUSINGS MOUNTED IN SAID CHAMBER BELOW SAID SUBSTRATE SUPPORTING MEANS; (C) EVAPORATING MEANS IN SAID HOUSINGS; (D) A PATTERN MASK SUPPORTING MEANS, MOUNTED INTERMEDIATE SAID EVAPORATION SOURCE HOUSINGS AND SAID SUBSTRATE SUPPORTING MEANS, FOR SUPPORTING A PLURALITY OF MASKS IN A PLANE SUBSTANTIALLY PARALLEL TO THE PLANE IN WHICH SAID SUBSTRATES ARE SUPPORTED; (E) A PLURALITY OF SHUTTERS MOUNTED INTERMEDIATE SAID SOURCE HOUSINGS AND SAID MASK SUPPORTING MEANS AND OPERABLE TO BE POSITIONED SO AS TO PREVENT VAPORS FROM SELECTED SOURCES FROM BEING DEPOSITED ON PRE-
Claim 2
Dependent Claim
129 words
IN A VACUUM CHAMBER HAVING MEANS TO EVACUATE GASES THEREFROM, THE COMBINATION COMPRISING: (A) A VERTICALLY MOVABLE SUBSTRATE SUPPORTING MEANS, ROTATABLY MOUNTED IN SAID CHAMBER, FOR SUPPORTING A PLURALITY OF SUBSTRATES IN A HORIZONTALLY DISPOSED PLANE; (B) A PLURALITY OF MATERIAL EVAPORATION SOURCE HOUSINGS MOUNTED IN SAID CHAMBER BELOW SAID SUBSTRATE SUPPORTING MEANS; (C) EVAPORATING MEANS IN SAID HOUSINGS; (D) A PATTERN MASK SUPPORTING MEANS, MOUNTED INTERMEDIATE SAID EVAPORATION SOURCE HOUSINGS AND SAID SUBSTRATE SUPPORTING MEANS, FOR SUPPORTING A PLURALITY OF MASKS IN A PLANE SUBSTANTIALLY PARALLEL TO THE PLANE IN WHICH SAID SUBSTRATES ARE SUPPORTED; (E) A PLURALITY OF SHUTTERS MOUNTED INTERMEDIATE SAID SOURCE HOUSINGS AND SAID MASK SUPPORTING MEANS AND OPERABLE TO BE POSITIONED SO AS TO PREVENT VAPORS FROM SELECTED SOURCES FROM BEING DEPOSITED ON PRE-
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-03-07 | 1969-09-06 | 1970-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-03-07 | 1973-09-06 | 1974-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-03-07 | 1977-09-06 | 1978-03-08 | $7700.00 | Window Closed / Lapsed |