US3234442A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for fabricating thin film circuit elements and resulting elements
Assignee: International Business Machines Corp
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Filing: 1962-03-23
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Granted: 1966-02-08
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Expires: 1982-03-23
Abstract
No abstract record available.
Inventors
- 👤 Leon I Maissel
- 👤 Norman W Silcox
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:38
CPC Classifications
H; H01; H01G; H01G4/00; H01G4/002; H01G4/228; C; C23; C23C; C23C14/00; C23C14/02; H01G4/018; H01G4/06; H01G4/08; H01G4/10; Y; Y10; Y10T; Y10T29/00; Y10T29/43; Y10T29/435; Y10T29/49; Y10T29/49002; Y10T29/49082; Y10T29/49099
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
104 words
A METHOD FOR APPLYING A COUNTER ELECTRODE OF A SHADOWING METAL DIRECTLY TO A METAL OXIDE FILM COMPRISING: POSITIONING A METAL OXIDE FILM CONTAINING MICROFISSURES THEREIN EXTENDING THROUGH SAID FILM AND HAVING WIDTHS OF A FRACTION OF A MICRON IN A VACUUM EVAPORATING APPARATUS; EVACUATING THE VACUUM CHAMBER OF SAID APPARATUS; AND EVAPORATING ALUMINUM AND CONDENSING THE ALUMINUM VAPORS UPON SAID METAL OXIDE FILM TO A FORM A COUNTER ELECTRODE THEREON IN A PERIOD OF AT LEAST THIRTY SECONDS WHEREBY THE RESIDUAL OXYGEN AND WATER VAPOR IN SAID CHAMBER CAUSES THE PARTIAL OXIDATION OF SAID ALUMINUM AS IT CONDENSES UPON SAID METAL OXIDE FILM.
Claim 2
Independent Claim
104 words
A METHOD FOR APPLYING A COUNTER ELECTRODE OF A SHADOWING METAL DIRECTLY TO A METAL OXIDE FILM COMPRISING: POSITIONING A METAL OXIDE FILM CONTAINING MICROFISSURES THEREIN EXTENDING THROUGH SAID FILM AND HAVING WIDTHS OF A FRACTION OF A MICRON IN A VACUUM EVAPORATING APPARATUS; EVACUATING THE VACUUM CHAMBER OF SAID APPARATUS; AND EVAPORATING ALUMINUM AND CONDENSING THE ALUMINUM VAPORS UPON SAID METAL OXIDE FILM TO A FORM A COUNTER ELECTRODE THEREON IN A PERIOD OF AT LEAST THIRTY SECONDS WHEREBY THE RESIDUAL OXYGEN AND WATER VAPOR IN SAID CHAMBER CAUSES THE PARTIAL OXIDATION OF SAID ALUMINUM AS IT CONDENSES UPON SAID METAL OXIDE FILM.
Claim 3
Dependent Claim
130 words
A THIN FILM CIRCUIT ELEMENT COMPRISING: A SUBSTRATE HAVING ADHERENTLY FIXED THEREON A BOTTOM ELECTRODE LAYER OF A METAL; A LAYER OF AN AXIDE OF SAID METAL OVER SAID METAL LAYER; SAID METAL AXIDE HAVING A RELATIVELY LOW TENSILE STRENGTH AND THERE IS PRESENT A RELATIVELY HIGH MISMATCH BETWEEN SAID ODIXE AND METAL LAYERS THEREBY CAUSING THE PRESENCE OF MICROFISSURES EXTENDING THROUGH THE OXIDE LAYER AND HAVING WIDTHS OF A FRACTION OF A MICRON; AT LEAST ONE COUNTER ELECTRODE DEPOSITED OVER SAID METAL OXIDE LAYER; AND A SHADOWING METAL OXIDE INSULATOR MATERIAL SUBSTANTIALLY FILLING THE SAID MICROFISSURES EXTENDING THROUGH THE SAID METAL OXIDE LAYER ADJACENT TO SAID COUNTER ELECTRODE; SAID BOTTOM ELECTRODE, METAL OXIDE AND COUNTER ELECTRODE LAYERS HAVING A CUMULATIVE THICKNESS IN THE ORDER OF THOUSANDS OF ANGSTROM UNITS.
Claim 4
Dependent Claim
130 words
A THIN FILM CIRCUIT ELEMENT COMPRISING: A SUBSTRATE HAVING ADHERENTLY FIXED THEREON A BOTTOM ELECTRODE LAYER OF A METAL; A LAYER OF AN AXIDE OF SAID METAL OVER SAID METAL LAYER; SAID METAL AXIDE HAVING A RELATIVELY LOW TENSILE STRENGTH AND THERE IS PRESENT A RELATIVELY HIGH MISMATCH BETWEEN SAID ODIXE AND METAL LAYERS THEREBY CAUSING THE PRESENCE OF MICROFISSURES EXTENDING THROUGH THE OXIDE LAYER AND HAVING WIDTHS OF A FRACTION OF A MICRON; AT LEAST ONE COUNTER ELECTRODE DEPOSITED OVER SAID METAL OXIDE LAYER; AND A SHADOWING METAL OXIDE INSULATOR MATERIAL SUBSTANTIALLY FILLING THE SAID MICROFISSURES EXTENDING THROUGH THE SAID METAL OXIDE LAYER ADJACENT TO SAID COUNTER ELECTRODE; SAID BOTTOM ELECTRODE, METAL OXIDE AND COUNTER ELECTRODE LAYERS HAVING A CUMULATIVE THICKNESS IN THE ORDER OF THOUSANDS OF ANGSTROM UNITS.
References Cited (Backward Citations)
US2734478A
Cited
US2899345A
Cited
US3093883A
Cited
US1906691A
Cited
US2497066A
Cited
US2822301A
Cited
US3066247A
Cited
US2993266A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-02-07 | 1969-08-09 | 1970-02-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-02-07 | 1973-08-09 | 1974-02-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-02-07 | 1977-08-09 | 1978-02-08 | $7700.00 | Window Closed / Lapsed |