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US3228812A Expired / Lapsed US ⏱️ 0.0 years remaining

Method of forming semiconductors

Assignee: Dickson Electronics Corp
•
Filing: 1962-12-04
•
Granted: 1966-01-11
•
Expires: 1982-12-04
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Abstract

No abstract record available.

Inventors

  • 👤 Dickson Betty Ann

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 04:05
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/503; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; H; H10; H10W; H10W74/00; H10W74/40; H10W74/43

Claims Analysis

Total Claims: 2
Claim 1
Independent Claim 80 words
THE METHOD OF PRODUCING A GLASS LIKE FILM ON A PREPARED SURFACE OF A SEMI-CONDUCTOR, WHICH CONPRISES INTRODUCING A DILUTE VAPOR OF A METAL HALIDE TO SUCH SURFACE AND INTRODUCING OZONE TO SUCH SURFACE TO CAUSE A REACTION BETWEEN SAID METAL HALIDE VAPOR AND SAID OZONE, TO FORM A SOLID OXIDE FILM OF SUCH METAL ON SAID SURFACE AND PRODUCE FREE HALOGEN MOLECULES AND FREE OXYGEN MOLECULES AND SUPPLYING FREE ENERGY TO THE REACTION ZONE TO ACCELERATE THE SAID REACTION.
Claim 2
Independent Claim 80 words
THE METHOD OF PRODUCING A GLASS LIKE FILM ON A PREPARED SURFACE OF A SEMI-CONDUCTOR, WHICH CONPRISES INTRODUCING A DILUTE VAPOR OF A METAL HALIDE TO SUCH SURFACE AND INTRODUCING OZONE TO SUCH SURFACE TO CAUSE A REACTION BETWEEN SAID METAL HALIDE VAPOR AND SAID OZONE, TO FORM A SOLID OXIDE FILM OF SUCH METAL ON SAID SURFACE AND PRODUCE FREE HALOGEN MOLECULES AND FREE OXYGEN MOLECULES AND SUPPLYING FREE ENERGY TO THE REACTION ZONE TO ACCELERATE THE SAID REACTION.

References Cited (Backward Citations)

US745966A Cited
US2962388A Cited
GB765190A Cited
US2952598A Cited
US3090703A Cited
US3089793A Cited
US3055776A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1969-01-10 1969-07-12 1970-01-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1973-01-10 1973-07-12 1974-01-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1977-01-10 1977-07-12 1978-01-11 $7700.00 Window Closed / Lapsed

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