US3194703A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of treating bodies of semiconductive material by chemically etching with an acid etching liquid
Assignee: US Philips Corp
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Filing: 1962-06-29
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Granted: 1965-07-13
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Expires: 1982-06-29
Abstract
No abstract record available.
Inventors
- 👤 Bloem Jan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:16
CPC Classifications
C; C09; C09K; C09K13/00; C09K13/04; C09K13/08; C23; C23F; C23F1/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
81 words
IN THE MANUFACTURE OF A SEMICONDUCTOR DEVICE, A METHOD OF CHEMICALLY ETCHING A SEMICONDUCTIVE BODY SELECTED FROM THE GROUP CONSISTING OF GERMANIUM AND SILICON, COMPRISING THE STEP OF SUBJECTING A SURFACE PORTION OF THE SAID BODY TO THE ETCHING ACTION OF AN ACID ETCHING AQUEOUS SOLUTION CONTAINING HYDROFLUORIC ACID, AT LEAST ONE OXIDIZING AGENT SELECTED FROM THE GROUP CONSISTING OF HYDROGEN PEROXIDE AND NITRIC ACID, AND FURTHER CONTAINING BETWEEN ABOUT 60% BY WEIGHT AND 85% B Y WEIGHT OF SULPHURIC ACID.
Claim 2
Dependent Claim
81 words
IN THE MANUFACTURE OF A SEMICONDUCTOR DEVICE, A METHOD OF CHEMICALLY ETCHING A SEMICONDUCTIVE BODY SELECTED FROM THE GROUP CONSISTING OF GERMANIUM AND SILICON, COMPRISING THE STEP OF SUBJECTING A SURFACE PORTION OF THE SAID BODY TO THE ETCHING ACTION OF AN ACID ETCHING AQUEOUS SOLUTION CONTAINING HYDROFLUORIC ACID, AT LEAST ONE OXIDIZING AGENT SELECTED FROM THE GROUP CONSISTING OF HYDROGEN PEROXIDE AND NITRIC ACID, AND FURTHER CONTAINING BETWEEN ABOUT 60% BY WEIGHT AND 85% B Y WEIGHT OF SULPHURIC ACID.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1968-07-12 | 1969-01-11 | 1969-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1972-07-12 | 1973-01-11 | 1973-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1976-07-12 | 1977-01-11 | 1977-07-13 | $7700.00 | Window Closed / Lapsed |