US3131099A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Manufacture of semiconductors
Assignee: Arris Technology Inc
•
Filing: 1962-07-27
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Granted: 1964-04-28
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Expires: 1982-07-27
Abstract
No abstract record available.
Inventors
- 👤 Constantakes Peter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 10:04
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/16; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S438/00; Y10S438/935
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
90 words
IN THE OPERATION OF A VAPOR DIFFUSION SYSTEM FOR THE MANUFACTURE OF SEMICONDUCTORS, USING A SOURCE OF INERT GAS HAVING A FLUSHING VALVE LEADING TO THE DIFFUSION CHAMBER AND HAVING A SOURCE VALVE LEADING TO A SOURCE TUBE IN THE DIFFUSION CHAMBER, THE METHOD OF MINIMIZING DIFFUSION DURING FLUSHING WHICH INCLUDES REVERSE VENTING THE SOURCE TUBE WHEN THE FLUSHIANG VALVE IS OPEN AND THE SOURCE VALVE IS CLOSED FOR FLUSHING PURPOSES, SO THAT ANY FLOW OF GAS IN THE SOURCE TUBE IS IN A DIRECTION AWAY FROM THE DIFFUSION CHAMBER.
Claim 2
Dependent Claim
90 words
IN THE OPERATION OF A VAPOR DIFFUSION SYSTEM FOR THE MANUFACTURE OF SEMICONDUCTORS, USING A SOURCE OF INERT GAS HAVING A FLUSHING VALVE LEADING TO THE DIFFUSION CHAMBER AND HAVING A SOURCE VALVE LEADING TO A SOURCE TUBE IN THE DIFFUSION CHAMBER, THE METHOD OF MINIMIZING DIFFUSION DURING FLUSHING WHICH INCLUDES REVERSE VENTING THE SOURCE TUBE WHEN THE FLUSHIANG VALVE IS OPEN AND THE SOURCE VALVE IS CLOSED FOR FLUSHING PURPOSES, SO THAT ANY FLOW OF GAS IN THE SOURCE TUBE IS IN A DIRECTION AWAY FROM THE DIFFUSION CHAMBER.
References Cited (Backward Citations)
US2689807A
Cited
US2804405A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1967-04-28 | 1967-10-28 | 1968-04-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1971-04-28 | 1971-10-28 | 1972-04-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1975-04-28 | 1975-10-28 | 1976-04-28 | $7700.00 | Window Closed / Lapsed |