US3085913A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum evaporation method
Assignee: International Business Machines Corp
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Filing: 1960-10-03
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Granted: 1963-04-16
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Expires: 1980-10-03
Abstract
No abstract record available.
Inventors
- 👤 Hoilis L Caswell
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 04:18
CPC Classifications
H; H10; H10N; H10N60/00; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; H01; H01B; H01B1/00
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
103 words
THE METHOD OF FORMING A THIN FILM OF MATERIAL BY THERMALLY EVAPORATING SAID MATERIAL THROUGH A PATTERN DEFINING MASK UPON A SUBSTRATE WITHIN A VACUUM SYSTEM COMPRISING; REDUCING THE TOTAL PRESSURE WITHIN SAID SYSTEM TO ABOUT 10-**5 MM. HG, SAID TOTAL PRESSURE BEING THE SUM OF PARTIAL PRESSURES OF A PLURALITY OF RESIDUAL GASES; AND THEN THERMALLY EVAPORATING SAID MATERIAL AT A CONSTANT RATE AFTER THE PARTIAL PRESSURE OF SELECTED ONES OF SAID PLURALITY OF RESIDUAL GASES HAS BEEN REDUCED BELOW A PREDETERMINED VALUE TO ENSURE THAT SAID DEPOSITED THIN FILM OF MATERIAL HAS SHARPLY DEFINED EDGE PORTIONS AS DETERMINED BY SAID MASK.
Claim 2
Independent Claim
103 words
THE METHOD OF FORMING A THIN FILM OF MATERIAL BY THERMALLY EVAPORATING SAID MATERIAL THROUGH A PATTERN DEFINING MASK UPON A SUBSTRATE WITHIN A VACUUM SYSTEM COMPRISING; REDUCING THE TOTAL PRESSURE WITHIN SAID SYSTEM TO ABOUT 10-**5 MM. HG, SAID TOTAL PRESSURE BEING THE SUM OF PARTIAL PRESSURES OF A PLURALITY OF RESIDUAL GASES; AND THEN THERMALLY EVAPORATING SAID MATERIAL AT A CONSTANT RATE AFTER THE PARTIAL PRESSURE OF SELECTED ONES OF SAID PLURALITY OF RESIDUAL GASES HAS BEEN REDUCED BELOW A PREDETERMINED VALUE TO ENSURE THAT SAID DEPOSITED THIN FILM OF MATERIAL HAS SHARPLY DEFINED EDGE PORTIONS AS DETERMINED BY SAID MASK.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1966-04-15 | 1966-10-15 | 1967-04-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1970-04-15 | 1970-10-15 | 1971-04-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1974-04-15 | 1974-10-15 | 1975-04-16 | $7700.00 | Window Closed / Lapsed |