US3065116A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vapor deposition of heavily doped semiconductor material
Assignee: International Business Machines Corp
•
Filing: 1959-12-31
•
Granted: 1962-11-20
•
Expires: 1979-12-31
Abstract
No abstract record available.
Inventors
- 👤 John C Marinace
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:27
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; C; C30; C30B; C30B25/00; C30B25/02; H10D; H10D99/00; H10P14/24; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/2921; H10P14/36; H10P14/3602; Y; Y10; Y10S; Y10S148/00; Y10S148/056
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
83 words
IN A METHOD OF VAPOR DEPOSITING SEMICONDUCTOR MATERIAL IN AN OPEN TUBE SYSTEM THE SIMULTANEOUS STEPS OF PROVIDING AN INDEPENDENT TEMPERATURE CONTROLLED FREE SOURCE OF A CONDUCTIVITY TYPE DETERMINING IMPURITY DOWNSTREAM OF THE SOURCE OF SEMICONDUCTOR MATERIAL TO BE DEPOSITED, THE MAINTAINING OF THE CONCENTRATION OF THE TRANSPORT ELEMENT IN THE VAPOR AT A MININUM VALUE SUFFICIENT FOR THE USEABLE DEPOSITS IN A SIX HOUR PERIOD AND THE MAINTAINING OF THE SUBSTRATE AT THE MINIMUM TEMPERATURE IN WHICH A MONOCRYSTALLINE DEPOSIT IS ACHIEVED.
Claim 2
Dependent Claim
83 words
IN A METHOD OF VAPOR DEPOSITING SEMICONDUCTOR MATERIAL IN AN OPEN TUBE SYSTEM THE SIMULTANEOUS STEPS OF PROVIDING AN INDEPENDENT TEMPERATURE CONTROLLED FREE SOURCE OF A CONDUCTIVITY TYPE DETERMINING IMPURITY DOWNSTREAM OF THE SOURCE OF SEMICONDUCTOR MATERIAL TO BE DEPOSITED, THE MAINTAINING OF THE CONCENTRATION OF THE TRANSPORT ELEMENT IN THE VAPOR AT A MININUM VALUE SUFFICIENT FOR THE USEABLE DEPOSITS IN A SIX HOUR PERIOD AND THE MAINTAINING OF THE SUBSTRATE AT THE MINIMUM TEMPERATURE IN WHICH A MONOCRYSTALLINE DEPOSIT IS ACHIEVED.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1965-11-19 | 1966-05-21 | 1966-11-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1969-11-19 | 1970-05-21 | 1970-11-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1973-11-19 | 1974-05-21 | 1974-11-20 | $7700.00 | Window Closed / Lapsed |