US2876184A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Transistor process and apparatus
Assignee: Motorola Solutions Inc
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Filing: 1954-06-02
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Granted: 1959-03-03
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Expires: 1974-06-02
Abstract
No abstract record available.
Inventors
- 👤 Donovan V Geppert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 07:59
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/60; H10P50/61; H10P50/613; Y; Y10; Y10S; Y10S438/00; Y10S438/977
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
123 words
THE METHOD FOR ETCHING A CAVITY IN AT LEAST ONE SURFACE OF A SEMICONDUCTOR WAFER WHICH COMPRISES, DIRECTING AN ELECTROLYTIC JET ONTO TH ESURFACE OF THE WAFER, PASSING AN ELECTRIC CURRENT THROUGH THE JET AND THROUGH THE WAFER TO ESTABLISH AN ETCHING ACTION BY THE JET ON THE SURFACE OF THE WAFER, PERIODICALLY VARYING THE RELATIVE POSITION OF SAID JET AND SAID WAFER WITH A RECIPROCAL MOVEMENT SO THAT SAID JET IS REPEATEDILY DIRECTED TO AT EAST TWO DISTINC POSITION ON THE SURFACE OF THE WATER A PREDETERMINE AMOUNT OF THE WAFER EACH TIME THE JET IS DIRECTED AT ONE POSITION AND ETCHING AWAY A LESSER AMOUNT OF THE WAFER THAN SAID PREDETERMINED AMOUNT EACH TIME THE JET IS DIRECTED AT THE OTHERPOSITION.
Claim 2
Independent Claim
123 words
THE METHOD FOR ETCHING A CAVITY IN AT LEAST ONE SURFACE OF A SEMICONDUCTOR WAFER WHICH COMPRISES, DIRECTING AN ELECTROLYTIC JET ONTO TH ESURFACE OF THE WAFER, PASSING AN ELECTRIC CURRENT THROUGH THE JET AND THROUGH THE WAFER TO ESTABLISH AN ETCHING ACTION BY THE JET ON THE SURFACE OF THE WAFER, PERIODICALLY VARYING THE RELATIVE POSITION OF SAID JET AND SAID WAFER WITH A RECIPROCAL MOVEMENT SO THAT SAID JET IS REPEATEDILY DIRECTED TO AT EAST TWO DISTINC POSITION ON THE SURFACE OF THE WATER A PREDETERMINE AMOUNT OF THE WAFER EACH TIME THE JET IS DIRECTED AT ONE POSITION AND ETCHING AWAY A LESSER AMOUNT OF THE WAFER THAN SAID PREDETERMINED AMOUNT EACH TIME THE JET IS DIRECTED AT THE OTHERPOSITION.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1962-03-02 | 1962-09-01 | 1963-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1966-03-02 | 1966-09-01 | 1967-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1970-03-02 | 1970-09-01 | 1971-03-03 | $7700.00 | Window Closed / Lapsed |