Wafer output control and management method and system in an IC plant

Abstract

Abstract An output management method for a fabrication plant employing a multiple-step process during a running period includes the following steps: a) determine the stage of work in process (WIP) in flow (Ifij) in the plant; b) determine the stage of WIP out flow (Ofij) in the plant; c) calculate the flow intensity (Flij) of the plant; d) calculate the equipment capacity (Cij) of the plant; e) calculate the equipment capacity allocation (Ecij) of the plant; f) determine the bottleneck stage capacity (Scij) of the plant; g) determine the rolling output (Oij) of the plant; h) calculate the remaining WIP (Rwij) in the plant; I) collect the daily output (Doij); j) duplicate the remaining WIP (Rwij) as the initial WIP (Wij) for the next day; k) test if the running period is already finished; go back to step (a) and repeat the process until the running period is finished.

Inventors

• 👤 Yean-Sheng Pan
• 👤 Horng-Huei Tzeng

Bibliographic Details