Ion source

Abstract

Abstract PURPOSE:To make the control of drawing-out easy, the selection of ion production possible, and also the production of a low speed ion beam easy, in a simple structure, by radiating the light to a gas led into a vacuum container. CONSTITUTION:A gas such as BF3 or the like is sprayed from a nozzle 7 and led to an ionization chamber of a vacuum container. And the BF3 gas is irradiated with the incident light from a vacuum line 5 which is connected to a synchrotron orbital radiation(SOR) to generate ions, and the ions accelerated by a weak electric field between electrodes 8 and 9 are drawn out. By using such a simple structure requiring no gas discharge and the like, the ion source is acquired in which the ion production and drawing-out can be controlled easily, the selectivity of the ion production is expanded, and the production of low speed ion beams can be also realized easily.

Inventors

• 👤 Nobuo Hayasaka

Bibliographic Details