Formation of thin film and apparatus therefor

Abstract

Abstract PURPOSE:To form a thin film on bar-shaped substrates by applying, within a bell jar, a high-frequency or/and DC power between the bar-shaped substrates becoming a plurality of electrodes, thereby producing a discharge between the bar-shaped substrates. CONSTITUTION:One end of bar-shaped substrates 5, 6 is inserted into the inser tion holes 3a, 4a of metallic holders 3, 4 so as to be substantially vertical to the holders 3, 4. Side boards 2 are set in a bell jar 1 so that the substrates 5, 6 become horizontal and the adjacent substrates 5, 6 are spaced at equal intervals. When a predetermined vacuum pressure is achieved within the bell jar, a raw gas is supplied. A high-frequency voltage or DC voltage is applied to the substrates 5, 6. A discharge is caused between the adjacent substrates 5, 6 and the raw gas is plasma decomposed, whereby a thin film is deposited on the surface of the substrates 5, 6.

Inventors

• 👤 Takehisa Nakayama
• 👤 Takashi Fujiwara
• 👤 Masahiko Hosomi
• 👤 Kenji Yamamoto
• 👤 Yoshihisa Owada

Bibliographic Details