Semiconductor device for millimeter wave band

Abstract

Abstract PURPOSE:To facilitate handling and adjustment to cover a wide band by packaging an element of a compound semiconductor of a monolithic IC provided with an antenna pattern and a waveguide, which leads a millimeter wave, in the input/output part of the millimeter wave. CONSTITUTION:Two millimeter wave waveguides 14 formed with bents 19 are allowed to face each other, and one end part of each waveguide is used as an input part 11a and the other is used as an output part 11b. A compound semiconductor element 13 of a monolithic IC provided with an antenna pattern 12 is attached between input and output parts 11a and 11b by an element attaching base material 15. A bias supply pattern 18 is formed on the semiconductor element 13. Antenna patterns 12 on both sides are matched to a semiconductor element operating part 16 by a matching circuit 17. Films 20 are attached to exits of waveguides 14 to prevent penetration of dust. Thus, handling and adjustment are facilitated and the millimeter wave is covered in a wide range.

Inventors

• 👤 Yoshio Aoki

Bibliographic Details