Gas laser equipment

Abstract

Abstract PURPOSE:To generate spatially uniform plasma, and improve cooling efficiency, by arranging a conductor wall with conductivity higher than plasma, which wall faces dielectric being a microwave incident window, and circulating laser gas in a space via airpermeable member which reflects microwave. CONSTITUTION:By intense microwave electromagnetic field being generated so as to concentrate in the vicinity of a ridge 21, laser gas such as carbon dioxide gas laser gas sealed in a discharge space 24 is subjected to discharge breakdown, plasma is generated, and laser medium is excited. In order to compulsorily circulate the laser gas by a blower 26, an air-permeating member 27 of metal honeycomb structure is arranged, which makes the laser gas pass and reflects the microwave. The discharge space 24 is formed between a conductor wall 22 and dielectric 23 which is arranged so as to face the conductor wall 22 and serves as an incidence window of microwave. In this discharge space, microwave discharge is generated, and the microwave enters only from the one side surface of plasma. Thereby, enabling the discharge by a desired microwave mode.

Inventors

• 👤 Kenji Yoshizawa
• 👤 Junichi Nishimae
• 👤 Masakazu Taki
• 👤 Tadashi Yanagi
• 👤 Yoshihiro Ueda

Bibliographic Details