Conveyor

Abstract

Abstract PURPOSE:To reduce dusting characteristics, to save space and to enable conveyance smoothly by arranging a conveying arm consisting of a four-bar link mechanism, a fixing knot of which is fixed into an anteroom, into a vacuum treater and holding an article to be treated to an intermediating knot for the conveying arm. CONSTITUTION:A conveying arm 5a conveying a tray 12, on which an article to be treated 11 is placed, into a treating chamber 1 from a loading mechanism 13 and a conveying arm 5b conveying the tray 12 to a separating mechanism 14 from the treating chamber 1 are installed into an anteroom 2. Each conveying arm 5a, 5b is composed of four-bar link mechanisms made up of fixing knots 2b, drive knots 6, intermediating knots 7 and follower knots 8. One ends of the drive knots 6 and one ends of the follower knots 8 are respectively connected rotatably at the specified positions of the fixing knots 2b, and the other ends of the drive knots 6 and the follower knots 8 are engaged by the intermediating knots 7. Holding arms 10 are fixed at one ends of the intermediating knots 7. The intermediating knot 7 and the follower knot 8 are formed to a straight shape at the atmospheric air side terminal of the locus 17 of the center of the article to be treated 11, and a point P3, a point P4 and a point P5 are arranged on a straight line. Accordingly, the conveying arms can be operated smoothly.

Inventors

• 👤 Hiroshi Iimori
• 👤 Hiroshi Yamada
• 👤 Akira Okada

Bibliographic Details