Plasma generating device

Abstract

Abstract PURPOSE:To generate high-density plasma only near the inner surface of a vacuum container by winding two electromagnetic induction coils in turn spirally in the same winding direction around the vacuum container. CONSTITUTION:A vacuum container 4 made of an insulating material such as quartz, coils 5 wound spirally on the surface around the vacuum container 4, and a high-frequency oscillator 6 connected to end sections of the coils 5 are provided. The coils 5 are formed by short-circuiting one of both ends of two coils wound in turn spirally in the same winding direction on the surface around the vacuum container 4. Since magnetic fields centering the adjacent coils have magnetic lines of force with opposite directions and offsetting each other, the region formed with the magnetic field is limited to the vicinity of the coils. Plasma with high density can be thereby generated near the coils 5, i.e., in the region near the inner surface of the vacuum container 4.

Inventors

• 👤 Shuji Nakao

Bibliographic Details