Inspection device

Abstract

Abstract PURPOSE:To make the positioning of the input/output terminals of a material to be inspected and the probes of a probe board accurate, by providing a first image detecting means, which detects the images of a sample table and the material to be inspected on the side of a main body, and providing a second image detecting means, which detects the images of the probe board and the main body on the side of the sample table. CONSTITUTION:A first image detecting means 8 is provided on the side of a main body 7, with which a probe board 6 is engaged. A plurality of probes 5 are fixed on the probe board 6. A material to be inspected 3 such as a semiconductor wafer is mounted on a Z-theta table 2. A second image detecting means 9 is provided on the side of the table 2. The images of the material to be inspected 3 mounted on the Z-theta table 2 and the secondary image detecting means 9 can be observed. The images of the probe board 6 and the first image detecting means 8 on the side of the main body can be also observed. Even if visual observation using a microscope is difficult, the accurate positioning of the probes 5 for a plurality of input/output terminals 4 can be automatically performed in this way.

Inventors

• 👤 Kenji Hida
• 👤 Ryuichi Takagi

Bibliographic Details