System for checking design rule for lsi

Abstract

Abstract PURPOSE:To prevent a check mistake and to obtain the LSI design high in quality by checking a design rule for LSI with the graphic data of a pad and a wiring. CONSTITUTION:The lay-out of the pad is formed from a pad circumferential part 6, namely, an area to be the subject of an assembling reference in the surrounding of the pad, a window 7 for the bonding of a protecting film, and Al wiring 8, a scribe line 9 and a pad part aluminum pattern 10. For the first half of a processing, the processing is executed mainly concerning a design reference from a process design and after that, pad recognition is executed. For one example of this pad recognition, the pad is recognized with an AND processing between data concerning the window 7 for the bonding and data concerning Al pattern of the pad wiring part 10, namely, with a graphic operation processing. Next, an check-area is set concerning the pad out of the assembling reference. Thus, the check of the design rule can be executed, the defective ratio in assembling the LSI can be decreased and the LSI high in quality can be developed.

Inventors

• 👤 Takeshi Sakata

Bibliographic Details