Production of magnetic recording medium
Abstract
Abstract PURPOSE:To obtain a recording film having the magnetic characteristics suitable for a high-density recording medium by forming an Fe-base alloy film by using a cluster ion beam vapor deposition method. CONSTITUTION:The magnetized film consisting of the Fe-base alloy is formed on a substrate consisting of a nonmagnetic material and/or magnetic material by the cluster ion beam vapor deposition method. The particles for vapor deposition are converted to clusters and the several atoms among these clusters are ionized by an electron ray shower and are thereafter accelerated by an electric field so as to be deposited on the substrate in the cluster ion beam vapor deposition method. The film can, therefore, be formed by freely controlling the energy of the particles for vapor deposition, unlike in the ordinary vacuum deposition or sputtering methods and, therefore, the recording film suitable for the high- density recording is obtainable if the conditions for the film formation are optimized.
Inventors
- 👤 Shinji Takayama
- 👤 Kazuyoshi Yoshida
Bibliographic Details
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