Superconducting monolithic microwave integrated circuit

Abstract

Abstract PURPOSE:To make possible the microminiaturization of a microstrip line by a method wherein a first superconducting thin film is provided on the surface of a semi-insulative compound semiconductor substrate and a dielectric thin film is provided thereon to constitute into a multilayer and moreover, a microstrip conductor, which is constituted of a second superconducting thin film, is constituted on this dielectric thin film. CONSTITUTION:A superconductor thin film 11 is provided on a semiinsulative GaAs substrate 18, a dielectric thin film 20 is provided thereon and a superconducting strip conductor 12 and a superconducting capacitor electrode 22, which is used as the upper electrode of a capacitor, are provided on the film 20. The conductor 12 is connected with the lead-out electrode of a gate electrode 19 of a field-effect transistor. That is, as the conductor 12 and a grounding conductor are constituted of a superconductor and a dielectric of a strip line is constituted of the film 20, a monolithic microwave integrated circuit having the low-loss microminiature strip line can be realized.

Inventors

• 👤 Kazuhiko Honjo

Bibliographic Details