Method of monitoring plasma etching

Abstract

Abstract PURPOSE:To measure the temperature and density of plasma without having effects upon the plasma by separating plasma light emitted from an observation aperture into two optical paths using a lens and a beam splitter and the like and by taking out respective specific two wavelengths of the plasma light through monochromators and multiplier phototubes, thereby monitoring the intensity of the wavelengths. CONSTITUTION:After passing through a condensing lens 3, plasma lights are separated into two optical paths and are injected into monochromators 5a and 5b and then, the plasma lights having specific wavelengths are taken out. When two optical paths of the above plasma lights are converted into electric signals through multiplier phototubes 6a and 6b, the intensity of the plasma lights in specific wavelengths which changes with time can be monitored. In such a case, if transition probability, number of oscillations, statistical weights, and excitation energy are known, the temperature of plasma which changes with time is obtained by applying Boltzmann equation. Further, if the temperature of plasma is substituted into Saha's equation which exhibits the relationship between the temperature and density of plasma, the density of plasma which changes with time is obtained.

Inventors

• 👤 Yoshiro Fujita

Bibliographic Details