Soft magnetic thin-film

Abstract

Abstract PURPOSE:To attain a decrease in coercive force without reducing the high saturation magnetic flux density an Fe film by containing iron nitride mainly comprising Fe and consisting of Fe4N and/or Fe3N and bringing the content of iron nitride to specific mol%. CONSTITUTION:A soft magnetic thin-film contains iron nitride mainly comprising Fe and composed of Fe4N and/or Fe3N, and the content of said iron nitride is brought to 2.1-9.7mol%. When the content of iron nitride is deviated from the range of 2.1-9.7mol%, it is difficult to attain coercive force of 5(Oe) or less. When the content of iron nitride is excessively increased particularly, the deterioration of magnetic characteristics is at issue. Coercive force Hc is brought to 5(Oe) or less when nitrogen content in a film extends over 2-7atom% though coercive force Hc is brought to 20(Oe) in a pure Fe film containing no nitrogen as distinct from the relationship of the content of nitrogen and the coercive force Hc of the film. A nitride (Fe3N, Fe4N) is formed in the film at that time, and the content extends over 2.1-9.7mol% as calculation from nitrogen content.

Inventors

• 👤 Kaoru Kijima
• 👤 Naoki Honda

Bibliographic Details