Plasma treating apparatus

Abstract

Abstract PURPOSE:To obtain the titled apparatus, having a detecting means for detecting the vacuum degree in a plasma treating chamber for containing and treating a work and a controlling means for controlling the number of revolutions of a motor in a vacuum producing device and preventing the deterioration in efficiency and useful for treating synthetic resins, etc. CONSTITUTION:A plasma treating apparatus, having an airtight plasma treating chamber 1 for containing and treating a work (W), a plasma producing device 2 for supplying plasma to the plasma treating chamber 1 and a vacuum producing device 3, driven by an electrically-operated motor 20 and sucking a gas intol the plasma treating chamber 1 for containing and treating the work (W), a detecting means 38 for directly or indirectly detecting the vacuum degree in the plasma treating chamber 1 and a controlling means 24 for receiving the output from the detecting means 38 and controlling the electrically-operated motor 20 to increase the number of revolutions thereof according to the increase of the vacuum degree of the plasma treating chamber 1. The surface of the work (W) is subjected to plasma treatment using the above-mentioned plasma treating apparatus.

Inventors

• 👤 Hiroshi Hayashi
• 👤 啓 林
• 👤 Keiji Fukuhara
• 👤 福原　啓二
• 👤 Takami Nakamura
• 👤 中村　隆美

Bibliographic Details