Carrier of semiconductor wafer

Abstract

Abstract PURPOSE:To simplify and miniaturize a wafer takeout device, by forming an inclined motion means in which a wafer housing case in supporting both at an inclining position where the peripheries of semiconductor wafers are made to abut on an abutted surface of the wafer housing case and at a horizontal position where the semiconductor wafers are supported horizontally. CONSTITUTION:A tray 6 is carried along guide rails 1, 2a, and 2b in the arrow A direction and stopped whin it arrives et a wafer takeout position P1. when an air cylinder 3 is supplied with compressed air and a rod 31 is extended, a lifting top 5 is raised and a rotational mechanism allows the lifting top 5 to incline a pallet 7 around an axis 71. Consequently a wafer carrier 9 is also inclined and so peripheries of semiconductor wafers w inside the wafer carrier 9 are made to abut on an inclining plate of the wafer carrier 9, so that horizontal central positions of the semiconductor wafers w mounted on respective shelves are identified. Thus a takeout miss is prevented and adjustment for positioning on a prober can be facilitated. Besides, because the wafers can be taken out horizontally, the takeout device cen be miniaturized in a simplified structure.

Inventors

• 👤 Masanobu Fujimoto
• 👤 藤本　端宣

Bibliographic Details