Microwave plasma treatment device

Abstract

Abstract PURPOSE:To make uniform and improve a treatment speed by making an energy distribution uniform, thereby arranging a metallic phase shifter for diffusing microwaves inside of a waveguide. CONSTITUTION:A phase shifter 18 is composed of, for example, a metallic piece 18a of aluminum and the like as well as a support 18b made of teflon as a heat resisting insulator, while it is necessary for the metallic piece 18a not to be earthed but to be electrically floated, because it is liable to absorb microwaves, once it comes in contact with a waveguide and so on. Therefore, the support 18b is composed of an electric insulator. As to effects of this metallic piece 18a, it is deemed to be as follows: it is not always clear from the theoretical point of view for this metallic piece to be considered that is serves as a kind of antenna and also the microwaves are so reflected and diffused by the metallic piece that an uniform energy distribution can be obtained by this metallic piece. However, plasmas can be uniformly developed by a convolutional effect between a microwave that directly passes through a transmission aperture 13 and other microwave that is reflected from the metallic piece and transmitted.

Inventors

• 👤 Shuzo Fujimura
• 👤 藤村　修三
• 👤 Yoshikazu Kato
• 👤 加藤　吉和

Bibliographic Details