Probing apparatus

Abstract

Abstract PURPOSE:To facilitate repair, control and change in an installing position and to set the operating position of an operator, by constituting a supporting post, which holds a magnifying mechanism so that the post can be attached to at least two places. CONSTITUTION:A supporting post 22, which holds a microscope 21, can be attached to a holding shafts 33, which are provided at least at two places, e.g., a rear surface side 23 and a right surface side 24 within a wafer prober so that the post can be attached and removed freely. Namely, a post coupling port is provided at the upper end of the holding shaft 33. The supporting post 22 is coupled into the coupling port. The post is coupled with the holding shaft 33 and tightened with a screw 34. Thus, the supporting post, which holds a magnifying mechanism for magnifying and observing a semiconductor chip, is constituted so that the post can be attached to the desired place. Repair, control and change in an installing position can be made easy. The operating position of an operator can be provided in correspondence with the case.

Inventors

• 👤 Wataru Karasawa
• 👤 唐沢　渉

Bibliographic Details