Generating method for mask with pattern

Abstract

Abstract PURPOSE:To easily generate an accurate mask by taking out picture elements on the outside frame line surrounding a pattern as reference picture elements in a background, and referring to the density histogram of reference picture elements to extract the pattern. CONSTITUTION:A picture is divided into many picture elements and density values of respective picture elements are inputted to a computer as data. The outside frame line surrounding the pattern in the picture is defined on a display device, and picture elements on this outside frame line are used as reference picture elements. The histogram of density values of reference picture elements is generated and is referred to discriminate picture elements in the pattern and those in the background by the computer, and closed areas A-E are formed. An operator indicates points P, Q, and R in closed areas to generate a mask shown in a figure (b) matched to the closed area B. Thus, the accurate mask is easily generated without tracing or the like.

Inventors

• 👤 Nobumoto Kani
• 👤 伸元 可児
• 👤 Akira Sato
• 👤 明 佐藤
• 👤 Yasuo Kubota
• 👤 靖夫 久保田
• 👤 Shinichi Hikosaka
• 👤 彦坂　真一
• 👤 Seiki Nakagawa
• 👤 清貴 中川

Bibliographic Details