Silent discharge type gas laser device

Abstract

Abstract PURPOSE:To prevent the contamination of a laser medium, and to stabilize laser output characteristics by forming a covering material by glass ceramics while low melting-point glass is flowed between the covering material and a dielectric coating metallic electrode and baked again. CONSTITUTION:Since outer surfaces except discharge sections are covered with covering materials 4 and low melting-point glass 5 in each metallic electrode 1, discharge regions are limited to the opposite surface sections of respective metallic electrode 1. The covering material 4 is shaped by glass ceramics as an inorganic material, which has excellent discharge resistance and in which discharge is not deteriorated, and low melting-point glass 5 flowed between the covering material 4 and the metallic electrode 1 and baked again is also formed by the inorganic material, thus discharging no organic component with discharge, then contaminating no laser medium. Accordingly, laser output characteristics can be stabilized.

Inventors

• 👤 Satoru Hayashi
• 👤 悟 林

Bibliographic Details