Projection optical device

Abstract

Abstract PURPOSE:To satisfactorily adjust image formation characteristics at any time by predicting variation in optical characteristics of a projection optical system from a mathematical expression presenting a linear model while correcting parameters and adjusting the optical characteristics based on the result. CONSTITUTION:Illumination light outputted by a light source 40 is made incident on a wafer W through a shutter 42, a reticle R, and a projection lens 26. A shutter 42 is driven by a shutter control system 44, which is connected to a main control system 46. The main control system 46 is connected to motors 48 and 50 for X and Y stage driving and also connected to a correction control system 52. This correction control system 52 consists of a parameter storage part 52A, an arithmetic part 52B, a corrected value output part 52C, and a parameter correction part 52D. This correction control system 52 predicts the optical characteristics of a projection optical system while correcting the parameters and a photodetector 54 or pressure controller 60 is controlled with its output.

Inventors

• 👤 Shoji Ishizaka
• 👤 石坂　祥司
• 👤 Hideo Mizutani
• 👤 英夫 水谷
• 👤 Susumu Makinouchi
• 👤 進 牧野内
• 👤 Shoichi Tanimoto
• 👤 昭一 谷元

Bibliographic Details