Dry etching device

Abstract

Abstract PURPOSE:To keep inside of a vacuum vessel constantly clean by liberation- removing any reactive product by heating by a method wherein removable adhesion preventive plates with heating unit inscribing upon the vacuum vessel are provided. CONSTITUTION:A dry etching device is provided with a vacuum vessel 1, a pair of flat plate electrodes 2, 3 opposingly provided in the vacuum vessel 1, a high frequency power supply 6 electrically connected to either one of the electrodes 2, 3 and removable adhesion preventive plates with a heating unit. Any product produced by reaction of etching gas adhering to the adhesion preventive plates 4 to a specimen can be liberation-removed by heating to keep inside of the vacuum vessel 1 constantly clean. Furthermore, even if the reactive product adhered to the adhesion preventive plates 4 can not be liberation- removed by heating, the removable adhesion preventive plates 4 can be replaced with new one.

Inventors

• 👤 Shinichiro Toyoda
• 👤 豊田　真一郎

Bibliographic Details