Fine particle removing device from ultrapure water

Abstract

Abstract PURPOSE:To produce ultrapure water having an extremely low concn. of fine particles by applying an electric charge to the fine particles in water in the final stage of producing the ultrapure water and separating the fine particles by utilizing the charge or by an electric field or magnetic field. CONSTITUTION:Raw water 1 is treated by respective treatment devices; a flocculating and filtering tank 3, a reverse osmosis membrane 4, an ion exchange device 5, a UV sterilizing lamp 6, a high-performance ion exchange device 7, and an ultrafilter membrane 8. The resultant ultrapure water is further applied with the voltage, etc., by a fine particle electrifying tank 10 to electrify the fine particles. Such water is introduced into a tank 12 impressed with the powerful electric or magnetic field, by which the water is divided to the water contg. the fine particles at a higher ratio and the water contg. said particles at a lower ratio. The water 9 contg. the fine particles at the lower ratio is sent to a use stage. As a result, the ultrapure water which has the extremely low concn. of the fine particles and is used for production of 4M bit of ultra LSIs, etc., for example, the ultrapure water contg. the fine particles of >=0.1mu grain size as extremely little as <=10 pieces in 1ml is produced.

Inventors

• 👤 Tatsuo Azuma
• 👤 東　辰夫

Bibliographic Details