JPS6345368A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Sputtering device
Assignee: Toshiba Corp
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Filing: 1986-08-13
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Granted: —
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Expires: 2006-08-13
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Shigeya Mori
- 👤 森 重哉
- 👤 Toshinobu Araki
- 👤 新木 俊宣
- 👤 Katsuya Okumura
- 👤 勝弥 奥村
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 03:37
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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