JPS63307192A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Production of compound crystal and apparatus therefor
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1987-06-06
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Granted: —
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Expires: 2007-06-06
Abstract
Abstract PURPOSE:To distribute the gas uniformly on the relief surface to keep the crystal thickness constant by placing a spherical gas regulator in the space which is formed by arranging a couple of base plates having relief depressions, face to face to regulate the gas flow of the starting materials. CONSTITUTION:A pair of base plates 1 having relief depressions is arranged face to face. A spherical gas regulator 4 is placed in the space formed by the reliefs to regulate the gas flow of the starting materials fed from the nozzle 2 so that the gas flows along the relief faces.
Inventors
- 👤 Motoharu Kikuchi
- 👤 菊池 茂登治
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-08 05:53
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455
Claims Analysis
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