Container for wafer cassette

Abstract

Abstract PURPOSE:To execute automation by an unmanned carrier system and purification in a process by holding a card, to which informations in a wafer cassette are written, and displaying the informations of a container body at a position where an upper surface is covered with the card. CONSTITUTION:A wafer cassette container has a containing body 14, the inside of which houses a wafer cassette, a card holding section arranged outside the container body and detachably holding a card 15, to which informations regarding a wafer in the wafer cassette are written, and a contained-information display section 18, which is disposed at a position where an upper surface is covered with the card 15 in the card holding section and displays informations regarding the containing body 14. The position of the emptied wafer cassette container, the time limit of washing, etc. can easily be discriminated even in an unmanned carrier system, etc. in such a container, thus positively conducting carrying, washing, etc. Accordingly, automation by the unmanned carrier system and purification in a process can be executed.

Inventors

• 👤 Akira Harada
• 👤 明 原田

Bibliographic Details