Cvd device

Abstract

Abstract PURPOSE:To positively collect a reaction product without decreasing the effective exhaust area by providing a collecting box of a specific structure for a reaction product and a high voltage source to the exhaust system of the title CVD device. CONSTITUTION:The reaction vessel 1 of the CVD device and the collecting box 2 are connected by a pipeline 3, and a flat discharge electrode 5 having a discharge needle 4 and a flat grounding electrode 6 are provided in the collecting box 2 is parallel with the exhaust stream. The high voltage source 7 is connected to the discharge electrode 4 and the grounding electrode 6, a high voltage is impressed between both electrodes 5 and 6 to generate corona discharge in the collecting box 2 from the discharge needle 4, and an ion is generated in the collecting box 2. The reaction product flowing into the collecting box 2 from the reaction vessel 1 through the pipeline 3 is charged by the deposition of the ion generated in the box 2, attracted by the voltage impressed between the discharge electrode 5 and the grounding electrode 6, accelerated, and deposited on both electrodes 5 and 6. The working rate of the device is increased by this mechanism, and the clogging of the exhaust system on the outside of the device can be reduced.

Inventors

• 👤 Atsushi Kaido
• 👤 海藤　厚志

Bibliographic Details