Pyroelectric infrared imaging device

Abstract

Abstract PURPOSE:To reduce the thickness, thermal capacity and to improve the sensitivity of an infrared ray image sensor by forming a structure in which a pyroelectric thin film on a plurality of isolating electrodes electrically connected to a signal charge reader is supported on a substrate. CONSTITUTION:A signal reader 2 is formed on one face of a semiconductor substrate 1, and a plurality of isolated electrodes 7 corresponding to elements electrically connected through an electric connector 4 and a leading electrode 6 to the reader 2 are formed. A common electrode 9 is further formed thereon. When an image is focused by an infrared ray irradiated from an object on a pyroelectric thin film 9, signal charges are generated in the elements of the film 8 in response to the infrared ray density, and only the region on the part on the electrodes 7 is utilized as an effective signal charge. The signal charges are sequentially read out through the electrode 7, the electrode 6 and the connector 4, and the reader 2, and reconstructed to obtain an infrared image signal.

Inventors

• 👤 Akira Kaneko
• 👤 彰 金子

Bibliographic Details