Tin coated work, and method and device for producing said work

Abstract

Abstract PURPOSE:To obtain the titled work which has the good adhesive power and quality of a film and permits production of tools, etc., having excellent characteristics by providing a composite layer consisting of a coating layer by an arc vapor deposition method and a coating layer by a melt vapor deposition method on the surface of a base material. CONSTITUTION:The work 2 consisting of a cutting tool, etc., is mounted and after a Ti raw material 16 is loaded into a hearth 4, the inside of a vacuum vessel 1 is evacuated to a vacuum. The work 2 is then heated 3 and soaked and after holding for the prescribed time, only the surface of the work 2 is allowed to cool down to a prescribed temp. An arc discharge is then generated in a Ti cathode 10 by a trigger 13 and a prescribed voltage is impressed or the work 2 by a DC bias power source 8 so that the work surface is sputter-cleaned by the Ti ions. The bias voltage is lowered after the sputter cleaning and gaseous N2 is introduced 6 into the vessel to execute the arc discharge of the cathode 10. The TiN layer is formed on the work as a 1st layer by such arc evaporation method. The TiN film (2nd layer) is thereafter formed on the work 2 by the operation similar to the above-mentioned operation, by which the TiN coated work is obtd.

Inventors

• 👤 Yasuyuki Yamada
• 👤 保之 山田
• 👤 Michitaka Katsuta
• 👤 勝田　通隆
• 👤 Masayasu Hino
• 👤 日野　正保
• 👤 Muneaki Tezaki
• 👤 手崎　宗昭
• 👤 Toshiaki Morimoto
• 👤 森本　暁明

Bibliographic Details