Active matrix array and method for inspecting such array

Abstract

Abstract PURPOSE:To permit high-speed detection of disconnection and short circuit defects in a non-contact state by providing photodiode elements on at least either of gate signal wires and source signal wires. CONSTITUTION:The photodiodes Dg1-Dg4 are provided on at least either of the gate signal wires and source signal wires of an active matrix array. A voltage impressing means 1 and a current detecting means 2 are connected. The means 1 generates a prescribed voltage. A light beam 5 is then projected only on the photodiode Dg1 by a photoirradiation means 3 to turn on the same. The current is detected in the means 2 if there is no disconnection in the gate signal wire G1. The light beam 5 is then projected only on the photodiode Dg2 to turn on the same and the current is detected by the means 2. The above- mentioned operation is carried out successively up to the photodiode Dg4. Then, the inspection can be made simply by projecting the light beam on the photodiodes. Missing of the inspection by the defective pressurized contact of a probe with the signal wires is obviated.

Inventors

• 👤 Hiroshi Takahara
• 👤 博司 高原
• 👤 Hitoshi Noda
• 👤 均 野田
• 👤 Mamoru Takeda
• 👤 守 竹田

Bibliographic Details