Method of forming superconducting ceramics

Abstract

Abstract PURPOSE:To prompt the formation of a superconductive ceramic easily and to obtain a superconductive ceramic having high critical temp. and high quality and being useful in the field of utilization of superconductivity by irradiating with high energy beams in the forming stage of the superconductive ceramic. CONSTITUTION:A raw materials for a sintered body 2 Y-Ba-Cu-O, etc. is charged to a vacuum chamber 1. Then, the sintered body 2 is sputtered while irradiating a substrate 3 of Zr, etc., with high energy beams such as excited ArF, eximer laser (1930Angstrom beam), etc. from a laser gun 4, and the sintered body 2 is evaporated. The evaporated raw material is deposited on the surface of the substrate 3. Thus, thin film of a superconductive ceramic having ca. 98K critical temp. is formed.

Inventors

• 👤 Toshihiko Takebe
• 👤 武部　敏彦
• 👤 Kunimitsu Yajima
• 👤 国光 矢島
• 👤 Futatsu Shirakawa
• 👤 白川　二

Bibliographic Details