Manufacture of amorphous hydrogenated carbon membranes

Abstract

Abstract PURPOSE:To enable formation of high-performance membranes at low temperatures near a room temperature level and at high speed by polymerizing specific hydrocarbon organic compounds using a low-frequency plasma discharge decomposition method under vacuum. CONSTITUTION:In the first-fifth tanks 6-10 of a capacitor coupling-type plasma CVD as a membrane manufacturing device, hydrocarbon organic compounds such as butadiene having an adiabatic first ionization potential of 8.5-10eV and carrier gases such as H2, He and Ar are hermetically sealed with other additive compounds such as halogen atoms. A reaction chamber 23 is kept under a constant vacuum condition and an electric power of 30-1kw at low frequency of 10-1,000kHz is applied to an electrode plate 22 from a low-frequency power source 26 to generate a plasma discharge between both electrodes 22, 25. Subsequently, amorphous hydrogenated carbon membranes of a desired thickness are formed on a preheated substrate 24 while compound vapors are properly supplied from the tanks.

Inventors

• 👤 Mochikiyo Osawa
• 👤 大澤　以清
• 👤 Shuji Iino
• 👤 修司 飯野
• 👤 Hideo Yasutomi
• 👤 英雄 保富

Bibliographic Details