Pyroelectric infrared image sensor

Abstract

Abstract PURPOSE:To connect all elements completely, simply and electrically by directly forming a pyroelectric body thin-film onto a plurality of separate electrodes electrically connected to signal charge reading sections. CONSTITUTION:Signal reading sections 2 are shaped to one surface of a semiconductor substrate 1, and a plurality of separate electrodes 3 electrically connected to the signal reading sections 2 and corresponding to each element are formed. A pyroelectric body thin-film 4 is shaped onto the separate electrodes 3 and the surface on the separate electrode 3 side in the semiconductor substrate 1, and a common electrode 5 is formed onto the pyroelectric body thin-film 4. Accordingly, the pyroelectric body thin-film 4 is shaped directly onto the separate electrodes 3 in each element, thus simply connecting the pyroelectric body thin-film 4 and the separate electrodes 3 in respective element with excellent precision even when the number of the elements is increased or the shapes of the elements are scaled down.

Inventors

• 👤 Akira Kaneko
• 👤 彰 金子

Bibliographic Details