force detection device

Abstract

Abstract PURPOSE:To easily manufacture a plate-like strain-generating body by using one of the center part and the peripheral part as a supporting part, using the other as a working part, and forming a detecting surface between both of them. CONSTITUTION:One of the center part 5 and the peripheral part 2 is used as a supporting part 4, and the other is used as a working part 7, and between both of them, a detecting surface 9 is formed. Subsequently, a plate-like strain- generating body 1 whose rigidity to the center part 5 and the peripheral part 2 is larger than that of the detecting surface 9 is formed. Also, on the detecting surface 9 of the plate-like strain-generating body 1, a detecting element 14 for varying an electric resistance by a mechanical deformation of the detecting surface 9 is formed. Next, on the same surface as the detecting surface 9, plural output amplifying elements connected to the detecting element 14 are formed. Accordingly, said body can be manufactured easily.

Inventors

• 👤 Hidekazu Ota
• 👤 英一 太田
• 👤 Hiroshi Yamazaki
• 👤 博史 山崎
• 👤 Hirotoshi Eguchi
• 👤 裕俊 江口
• 👤 Yuji Kimura
• 👤 裕治 木村
• 👤 Kazuhiro Okada
• 👤 和廣 岡田
• 👤 Koji Izumi
• 👤 泉　耕二

Bibliographic Details