Photocorductive sensitized material and its manufacture

Abstract

Abstract PURPOSE:To obtain a photoconductive sensitized material for electrophotography in which a hydrogenated amorphous carbon film is formed, by inserting a conductive substrate in a chemical deposition equipment of high vacuum, into which a dopand and acetylene gas are introduced, and applying electron impulse for manufacturing. CONSTITUTION:Prom a under part 14, a conductive substrate 5 is inserted in a chemical deposition equipment 1 which is highly vacuumized, acetylene gas 7a and a dopant 7b are mined and introduced into the inside, and the electron beam of a high frequency plasma generating equipment 15 is accelerated by a mesh-type electrode 2. The substrate 5 is heated, via a quarz glass window 12, by a halogen lamp 10 provided with a reflecting plate 11. By this manufacturing method, acetylene molecules and dopant molecules are attached on the substrate 5, which are decomposed by the bomlardment of the electron bean, and form a hydrogenated amorphous carbon film subjected to doping. This has excellent photo conductivity, and is useful for sensitized material for electrophotography because of hardness and chemical inertness.

Inventors

• 👤 Tadatsugu Ito
• 👤 伊藤　糾次
• 👤 Atsushi Nakajima
• 👤 淳 中島
• 👤 Kenji Noda
• 👤 研二 野田

Bibliographic Details