Production of transition metal carbide film

Abstract

Abstract PURPOSE:To form a transition metal carbide film having excellent crystallinity of a base material by introducing the vapors of an unsatd. group-contg. hydrocarbon compd. and transition metal halide simultaneously into a quartz reaction tube and heating and cracking the same in a specific temp. range. CONSTITUTION:Gaseous Ar is supplied from a gaseous Ar control system 2 into bubble vessels 1 and 1' in which benzene and titanium tetrachloride are housed to bubble the benzene and titanium tetrachloride respectively independently. These gases are then supplied through a glass tube 3 into the quartz reaction tube 4. Since the quartz reaction tube 4 is heated by a heating furnace 8 to 600-1,000 deg.C, the respective gases are simultaneously thermally cracked. The titanium and carbon atoms generated by the thermal cracking react with each other to form the titanium carbide. The titanium carbide deposits on the substrate 4 and forms the thin titanium carbide film thereon.

Inventors

• 👤 Yoshikazu Yoshimoto
• 👤 好本　芳和
• 👤 Tomonari Suzuki
• 👤 鈴木　友成
• 👤 Shigeo Nakajima
• 👤 中島　重夫

Bibliographic Details