Combination vacuum pump

Abstract

Abstract PURPOSE:To make the captioned pump compact by providing thread grooves on either of the inside and outside cylinder parts of the rotor or the inside and outside stator parts of the stator of a thread groove type compression pump, in close vicinity to the inner and outer peripheral faces of the other. CONSTITUTION:A thread groove type compression pump 9 has a rotor 7 and a stator 8. Thread grooves 17a-17c are formed on either of the inside and outside cylinder parts 7a, 7b of the rotor 7 or the inside and outside stator parts 8a, 8b of the stator 8, in close vicinity to the inner and outer peripheral faces of the other. Thereby, it is not necessary to form the thread groove type compression pump in vertically multiple stages, reducing an installing space.

Inventors

• 👤 Kanjiro Kinoshita
• 👤 歓治郎 木下

Bibliographic Details