Substrate attracting and clamping device

Abstract

Abstract PURPOSE:To secure a substrate on a substrate bearing surface even if the substrate is warped by composing substrate delivering means of a plurality of substrate supports having substrate bearing surfaces of small area, thereby correcting the warped substrate. CONSTITUTION:Substrate attracting and clamping means A and substrate delivering means B are provided. A flat substrate bearing surface 2 and a substrate attracting and clamping plate 1 having attracting groove formed, for example, in a latticelike pattern to be connected to external sucking means through a suction communication hole 4 and a suction external connection tube 5 near the bearing surface 2 are provided. The means B has, for example, circular substrate bearing surface 13 of small area. An attracting groove 15 disposed near the surface 13 to be connected to external sucking means through sucking hole 16 extended longitudinally in a support 14 is formed at the substrate bearer 12 of a plurality of substrate supports 11. Sealing means 23 is formed between the clamping plate 1 and the plurality of supports 11.

Inventors

• 👤 Masanobu Doken
• 👤 道券　正延
• 👤 Yoshio Kawai
• 👤 義夫 河合
• 👤 Nobuyuki Shimada
• 👤 島田　信幸
• 👤 Yoshiaki Mimura
• 👤 三村　義昭

Bibliographic Details