JPS63115338A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Low temperature dry etching method and device
Assignee: Hitachi Ltd
•
Filing: 1986-11-04
•
Granted: —
•
Expires: 2006-11-04
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Kazunori Tsujimoto
- 👤 和典 辻本
- 👤 Shinichi Taji
- 👤 新一 田地
- 👤 Sadayuki Okudaira
- 👤 奥平 定之
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 05:58
CPC Classifications
—
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
JPS558593A
Cited
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.