Displacement measuring instrument

Abstract

Abstract PURPOSE:To measure an extremely close interval with high accuracy by finding the displacement of an object body by utilizing a leak of light in a reflecting surface. CONSTITUTION:Luminous flux L1 from a laser light source 1 is incident on an optical component 2 at an angle thetai1 of incidence and projected at an angle thetai2 of projection to become luminous flux L4, which travels to a photoelectric sensor 3 and is converted photoelectrically. The output of the sensor 3 is inputted to a processor 4 in the form of a voltage or current. At this time, a little light leaks to an external field from the border between the optical component 2 and the medium as the external field. Namely, when the objective body 5 comes close to the bottom surfaces S of the optical component 2 up to wavelength order, luminous flux L2 is reflected at a point B while the leaking light is absorbed by the objective body 5 to become pieces of luminous flux L3 and L4, so that the luminous flux traveling the sensor 3 is reduced. This is found from the output of the photoelectric sensor 3 and the output is measured, so that the interval (x) is calculated by the processor 4 and displayed on a display device 6.

Inventors

• 👤 Masakazu Hayashi
• 👤 正和 林

Bibliographic Details