Light deflecting device

Abstract

Abstract PURPOSE:To make a revolving shaft and a fixed shaft compact and improve the rotation precision by using a spiral groove and a pair of herringbone grooves to constitute a bearing and joining a bearing part and a mirror attaching part into one body. CONSTITUTION:A thrust dynamic pressure bearing consists of a spiral groove 18 and a ceramic disk 17, and a radial dynamic pressure bearing is formed with herringbone grooves 19. When a voltage is impressed to a coil 16 in a prescribed power supply mode, a repellent is caused in a rotary magnet 9 to continuously rotate a revolving shaft 3 in one direction. When a laser beam is made incident through a window part 14, the exit angle of the laser beam made incident on the surface of a rotating mirror 6 rotating together with the revolving shaft 3 as one body is continuously changed in accordance with rotation to perform scanning. Meanwhile, the spiral groove 18 and herringbone grooves 19 are rotated relatively to the disk 17 and a fixed shaft 2 in accordance with rotation of the revolving shaft 3 to cause air currents on respective counter surfaces, and gaps are formed between the revolving shaft 3 and the fixed shaft 2 as well as the ceramic disk 17, thus constituting a pneumatic bearing having the radial dynamic pressure bearing and the thrust dynamic pressure bearing.

Inventors

• 👤 Mitsuo Suzuki
• 👤 光夫 鈴木
• 👤 Koki Tajima
• 👤 広喜 田島

Bibliographic Details