X-y stage

Abstract

Abstract PURPOSE:To improve the traveling performance and responsiveness and simplify the assembling and adjusting works by making equal the height of the driving position of the movable guides in the X and Y directions and the position height of the center of gravity of a free stage, thus preventing the pitching during the traveling of the free stage. CONSTITUTION:A movable guide 2 in the X-axis direction and a movable guide 3 in the Y-axis direction are supported in slidable ways onto a surface plate 1, and the both edges are joined by connecting members 22 and 32. An elliptical hole 24 is formed onto the movable guide 2 in the X-axis direction, and the movable guide 3 in the Y-axis direction is allowed to penetrate. A free stage 4 is supported onto the crossing part, using the opposed surfaces of the guide members 21, 21, and 31, 31 as guide surfaces. Said free stage 4 is constituted from the collar walls 42 and 43 arranged in the vertical direction in a square cylindrical body 41, having a wafer driving mechanism 44 inside and a wafer stage 45 on the upper surface of the cylindrical body 41. Since the height of the both movable guides 2 and 3 and the height of the center of gravity of the stage 4 can be set equal in this constitution, the traveling characteristic can be improved, and the bearing gap can be easily adjusted.

Inventors

• 👤 Keiichi Tsutsui
• 👤 敬一 筒井
• 👤 Sadao Suyama
• 👤 定夫 杉山
• 👤 Yoshihito Koshiba
• 👤 小柴　美仁

Bibliographic Details