Gas laser device

Abstract

Abstract PURPOSE:To prevent damages of the gas system and the optical resonating system of a laser device due to water even if a discharge tube is broken, by constituting power feeding electrodes by metal blocks, which are provided with heat radiating fins. CONSTITUTION:Metal blocks 21 and 22 are provided with heat radiating fins comprising aluminum and the like and closely contacted with a discharge tube 1. The blocks also serve the roles of power feeding electrodes. The surface of the area of the heat radiating fins is about three times the area of the power feeding electrodes, which are closely contacted with the discharge tube. Namely, heating at the parts of the power feeding electrodes of the discharge tube 2 is large. Therefore, about 30% of heat is carried away from the electrodes 21 and 22 by water cooling. Thus, it is not necessary to cool the entire outer surface of the discharge tube in order to cool the discharge tube with water. Only the power feeding electrode parts may be cooled with water.

Inventors

• 👤 Masaaki Tanaka
• 👤 正明 田中
• 👤 Masaki Kuzumoto
• 👤 昌樹 葛本
• 👤 Satoru Hayashi
• 👤 悟 林

Bibliographic Details